TY - JOUR
T1 - Real-time, in situ photoelectron emission microscopy observation of CVD diamond oxidation and dissolution on molybdenum
AU - Wang, Congjun
AU - Shovlin, Joseph D.
AU - Kordesch, Martin E.
AU - Macaulay, John M.
N1 - Funding Information:
This work was supported by the Office of Naval Research through SDIO/IST grant N00014-91-J-1596. Financial support was also received from the CMSS program of Ohio University and NATO. AT&T Bell Laboratories are gratefully acknowledged for the scanning electron micrographs in Figs. 1 (a) and l(b).
PY - 1994/5
Y1 - 1994/5
N2 - The oxidation and dissolution of sparsely nucleated, 1-2 μm diameter hot filament CVD diamonds on polycrystalline Mo substrates was observed in situ, in real-time using photoelectron emission microscopy (PEEM). At about 875 K, pox = 3 × 10-8 Torr, CVD diamond is etched by oxygen, leaving the Mo/Mo-carbide substrate complex unaffected. Dissolution of CVD diamond into the Mo substrate begins at about 1475 K in ultrahigh vacuum. Oxidative removal of diamond leaves pits in the substrate; diamond dissolution results in raised, bump-like hillocks. These bumps are identified with X-ray photoelectron spectroscopy as molybdenum carbide. The substrate morphology after oxygen etching and dissolution indicates that the molybdenum carbide is primarily a barrier against carbon diffusion into the Mo bulk, rather than a nucleation layer.
AB - The oxidation and dissolution of sparsely nucleated, 1-2 μm diameter hot filament CVD diamonds on polycrystalline Mo substrates was observed in situ, in real-time using photoelectron emission microscopy (PEEM). At about 875 K, pox = 3 × 10-8 Torr, CVD diamond is etched by oxygen, leaving the Mo/Mo-carbide substrate complex unaffected. Dissolution of CVD diamond into the Mo substrate begins at about 1475 K in ultrahigh vacuum. Oxidative removal of diamond leaves pits in the substrate; diamond dissolution results in raised, bump-like hillocks. These bumps are identified with X-ray photoelectron spectroscopy as molybdenum carbide. The substrate morphology after oxygen etching and dissolution indicates that the molybdenum carbide is primarily a barrier against carbon diffusion into the Mo bulk, rather than a nucleation layer.
UR - http://www.scopus.com/inward/record.url?scp=0028425113&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0028425113&partnerID=8YFLogxK
U2 - 10.1016/0925-9635(94)90119-8
DO - 10.1016/0925-9635(94)90119-8
M3 - Article
AN - SCOPUS:0028425113
SN - 0925-9635
VL - 3
SP - 1066
EP - 1071
JO - Diamond and Related Materials
JF - Diamond and Related Materials
IS - 7
ER -