Abstract
The rule of the distortion introduced by pressure and thermal stresses in the active cooling mirror were proved experimentally. In order to minimize the distortion of a mirror the active cooing mirror should be consisted of a thin faceplate layer, a good heat exchanger layer and a hard rigidity substrate. According to this requirement of a superthin multilayer mirror were designed. Its maximum distortion was only 0.10 μm, when the 8.69kw laser beam was incident on the surface of mirror and the coolant pressure was 0.13MPa.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Pages | 375-379 |
| Number of pages | 5 |
| Volume | 2888 |
| DOIs | |
| State | Published - 1996 |
| Event | Laser Processing of Materials and Industrial Applications - Beijing, China Duration: Nov 6 1996 → Nov 7 1996 |
Other
| Other | Laser Processing of Materials and Industrial Applications |
|---|---|
| City | Beijing, China |
| Period | 11/6/96 → 11/7/96 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering