Abstract
We describe a theoretical methodology for screening potential gate dielectric materials. A recently proposed method for constructing realistic structural models of the Si-dielectric interface is used to generate the Si-SiO2-Si and Si-SiON-SiO2-Si model metal-oxide-semiconductor (MOS) structures. We use ballistic transport approach to investigate the low bias leakage through these ultra-thin dielectric layers. We investigate the thermodynamic stability of the SrTiO3-Si interface, and present the first ab-initio study of the structure and electronic properties of crystalline HfO2.
Original language | English (US) |
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Pages | 155-160 |
Number of pages | 6 |
State | Published - 2000 |
Externally published | Yes |
Event | 27th International Symposium on Compound Semiconductors - Monterey, CA, United States Duration: Oct 2 2000 → Oct 5 2000 |
Other
Other | 27th International Symposium on Compound Semiconductors |
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Country/Territory | United States |
City | Monterey, CA |
Period | 10/2/00 → 10/5/00 |
ASJC Scopus subject areas
- General Engineering