Ultraviolet-Raman studies of SrTiO3 ultrathin films on Si

L. Hilt Tisinger; R. Liu; J. Kulik; X. Zhang; J. Ramdani; A. A. Demkov

doi:10.1116/1.1531645

Ultraviolet-Raman studies of SrTiO₃ ultrathin films on Si

L. Hilt Tisinger, R. Liu, J. Kulik, X. Zhang, J. Ramdani, A. A. Demkov

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

Ultrathin epitaxial SrTiO₃ grown by molecular beam epitaxy on Si substrates was analyzed with UV-Raman spectroscopy without complications from the underlying substrate. Stoichiometric STO films showed first order Raman peaks indicating the breaking of the local symmetry due to dislocations and most likely from strain in the local vicinity of defects. TEM revealed that the Ti-rich sample has domain boundaries with two phases with different chemistry. The Sr-rich sample compensated for excess Sr by forming SrO Ruddlesden-Popper layers in the perovskite structure.

Original language	English (US)
Pages (from-to)	53-56
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	1 SPEC.
DOIs	https://doi.org/10.1116/1.1531645
State	Published - Jan 2003
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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AU - Tisinger, L. Hilt

AU - Liu, R.

AU - Kulik, J.

AU - Zhang, X.

AU - Ramdani, J.

AU - Demkov, A. A.

PY - 2003/1

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AB - Ultrathin epitaxial SrTiO3 grown by molecular beam epitaxy on Si substrates was analyzed with UV-Raman spectroscopy without complications from the underlying substrate. Stoichiometric STO films showed first order Raman peaks indicating the breaking of the local symmetry due to dislocations and most likely from strain in the local vicinity of defects. TEM revealed that the Ti-rich sample has domain boundaries with two phases with different chemistry. The Sr-rich sample compensated for excess Sr by forming SrO Ruddlesden-Popper layers in the perovskite structure.

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ER -

Ultraviolet-Raman studies of SrTiO₃ ultrathin films on Si

Abstract

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